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BibTeX record conf/irps/ViegasFAKHMCH22
@inproceedings{DBLP:conf/irps/ViegasFAKHMCH22, author = {Alison Erlene Viegas and Konstantinos Efstathios Falidas and Tarek Nadi Ismail Ali and Kati K{\"{u}}hnel and Raik Hoffmann and Clemens Mart and Malte Czernohorsky and Johannes Heitmann}, title = {Reliability of Ferroelectric and Antiferroelectric Si: HfO2 materials in 3D capacitors by {TDDB} studies}, booktitle = {{IEEE} International Reliability Physics Symposium, {IRPS} 2022, Dallas, TX, USA, March 27-31, 2022}, pages = {47--1}, publisher = {{IEEE}}, year = {2022}, url = {https://doi.org/10.1109/IRPS48227.2022.9764517}, doi = {10.1109/IRPS48227.2022.9764517}, timestamp = {Fri, 02 Aug 2024 09:02:15 +0200}, biburl = {https://dblp.org/rec/conf/irps/ViegasFAKHMCH22.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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