BibTeX record conf/ieeesensors/NabaviMN21

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@inproceedings{DBLP:conf/ieeesensors/NabaviMN21,
  author       = {Seyedfakhreddin Nabavi and
                  Micha{\"{e}}l M{\'{e}}nard and
                  Frederic Nabki},
  title        = {Surface Micromachined Out-of-plane Electrostatic {MEMS} Actuator Integrated
                  with Displacement Sensor},
  booktitle    = {2021 {IEEE} Sensors, Sydney, Australia, October 31 - Nov. 3, 2021},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2021},
  url          = {https://doi.org/10.1109/SENSORS47087.2021.9639643},
  doi          = {10.1109/SENSORS47087.2021.9639643},
  timestamp    = {Sat, 30 Sep 2023 09:47:42 +0200},
  biburl       = {https://dblp.org/rec/conf/ieeesensors/NabaviMN21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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