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BibTeX record conf/ieeesensors/NabaviMN21
@inproceedings{DBLP:conf/ieeesensors/NabaviMN21, author = {Seyedfakhreddin Nabavi and Micha{\"{e}}l M{\'{e}}nard and Frederic Nabki}, title = {Surface Micromachined Out-of-plane Electrostatic {MEMS} Actuator Integrated with Displacement Sensor}, booktitle = {2021 {IEEE} Sensors, Sydney, Australia, October 31 - Nov. 3, 2021}, pages = {1--4}, publisher = {{IEEE}}, year = {2021}, url = {https://doi.org/10.1109/SENSORS47087.2021.9639643}, doi = {10.1109/SENSORS47087.2021.9639643}, timestamp = {Sat, 30 Sep 2023 09:47:42 +0200}, biburl = {https://dblp.org/rec/conf/ieeesensors/NabaviMN21.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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