"Surface Micromachined Out-of-plane Electrostatic MEMS Actuator Integrated ..."

Seyedfakhreddin Nabavi, Michaël Ménard, Frederic Nabki (2021)

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DOI: 10.1109/SENSORS47087.2021.9639643

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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Seyedfakhreddin Nabavi, Michaël Ménard, Frederic Nabki:
Surface Micromachined Out-of-plane Electrostatic MEMS Actuator Integrated with Displacement Sensor. IEEE SENSORS 2021: 1-4

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