BibTeX record conf/icra/TeoCYL07

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@inproceedings{DBLP:conf/icra/TeoCYL07,
  author       = {Tat Joo Teo and
                  I{-}Ming Chen and
                  Guilin Yang and
                  Wei Lin},
  title        = {A Novel Actuator for High-Precision Alignment in a Nano-Imprint Multi-Layers-Interconnection
                  Fabrication},
  booktitle    = {2007 {IEEE} International Conference on Robotics and Automation, {ICRA}
                  2007, 10-14 April 2007, Roma, Italy},
  pages        = {1419--1424},
  publisher    = {{IEEE}},
  year         = {2007},
  url          = {https://doi.org/10.1109/ROBOT.2007.363183},
  doi          = {10.1109/ROBOT.2007.363183},
  timestamp    = {Sat, 31 Jul 2021 17:22:25 +0200},
  biburl       = {https://dblp.org/rec/conf/icra/TeoCYL07.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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