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"A Novel Actuator for High-Precision Alignment in a Nano-Imprint ..."

Tat Joo Teo et al. (2007)

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DOI: 10.1109/ROBOT.2007.363183

access: closed

type: Conference or Workshop Paper

metadata version: 2021-07-31

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Tat Joo Teo, I-Ming Chen, Guilin Yang, Wei Lin:
A Novel Actuator for High-Precision Alignment in a Nano-Imprint Multi-Layers-Interconnection Fabrication. ICRA 2007: 1419-1424

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