BibTeX record conf/iconac/RenZLZ19

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@inproceedings{DBLP:conf/iconac/RenZLZ19,
  author       = {Dongxu Ren and
                  Zexiang Zhao and
                  Bin Li and
                  Wenhan Zeng},
  editor       = {Hui Yu},
  title        = {Influence of Exposure Energy Control for High Voltage Pulsed Xenon
                  Lamp on the Lithography Accuracy of Linear Grating},
  booktitle    = {25th International Conference on Automation and Computing, {ICAC}
                  2019, Lancaster, United Kingdom, September 5-7, 2019},
  pages        = {1--5},
  publisher    = {{IEEE}},
  year         = {2019},
  url          = {https://doi.org/10.23919/IConAC.2019.8895223},
  doi          = {10.23919/ICONAC.2019.8895223},
  timestamp    = {Mon, 18 Nov 2019 13:48:07 +0100},
  biburl       = {https://dblp.org/rec/conf/iconac/RenZLZ19.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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