"Influence of Exposure Energy Control for High Voltage Pulsed Xenon Lamp on ..."

Dongxu Ren et al. (2019)

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DOI: 10.23919/ICONAC.2019.8895223

access: closed

type: Conference or Workshop Paper

metadata version: 2019-11-18

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Dongxu Ren, Zexiang Zhao, Bin Li, Wenhan Zeng:
Influence of Exposure Energy Control for High Voltage Pulsed Xenon Lamp on the Lithography Accuracy of Linear Grating. ICAC 2019: 1-5

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