BibTeX record conf/icmens/GrundkeDPBSWRMPPV05

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@inproceedings{DBLP:conf/icmens/GrundkeDPBSWRMPPV05,
  author       = {Karina Grundke and
                  Astrid Drechsler and
                  Nicole Petong and
                  Cornelia Bellmann and
                  Manfred Stamm and
                  Odo Wunnicke and
                  Jens Reichelt and
                  Iris M{\"{a}}ge and
                  B. Pinter and
                  T. Pearce and
                  M. Voigt},
  title        = {On the Effect of Cationic Surfactants in the Rinse to Reduce Pattern
                  Collapse in High Aspect Ratio Patterning of Photoresists},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {14--15},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.93},
  doi          = {10.1109/ICMENS.2005.93},
  timestamp    = {Fri, 24 Mar 2023 00:03:40 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/GrundkeDPBSWRMPPV05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}