"On the Effect of Cationic Surfactants in the Rinse to Reduce Pattern ..."

Karina Grundke et al. (2005)

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DOI: 10.1109/ICMENS.2005.93

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Karina Grundke, Astrid Drechsler, Nicole Petong, Cornelia Bellmann, Manfred Stamm, Odo Wunnicke, Jens Reichelt, Iris Mäge, B. Pinter, T. Pearce, M. Voigt:
On the Effect of Cationic Surfactants in the Rinse to Reduce Pattern Collapse in High Aspect Ratio Patterning of Photoresists. ICMENS 2005: 14-15

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