BibTeX record conf/essderc/KnezevicSLNEDS19

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@inproceedings{DBLP:conf/essderc/KnezevicSLNEDS19,
  author       = {Tihomir Knezevic and
                  Tomislav Suligoj and
                  Xingyu Liu and
                  Lis K. Nanver and
                  Ahmed Elsayed and
                  Jan F. Dick and
                  J{\"{o}}rg Schulze},
  title        = {Back-end-of-line CMOS-compatible diode fabrication with pure boron
                  deposition down to 50 {\textdegree}C},
  booktitle    = {49th European Solid-State Device Research Conference, {ESSDERC} 2019,
                  Cracow, Poland, September 23-26, 2019},
  pages        = {242--245},
  publisher    = {{IEEE}},
  year         = {2019},
  url          = {https://doi.org/10.1109/ESSDERC.2019.8901810},
  doi          = {10.1109/ESSDERC.2019.8901810},
  timestamp    = {Sun, 02 Oct 2022 16:00:38 +0200},
  biburl       = {https://dblp.org/rec/conf/essderc/KnezevicSLNEDS19.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}