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"Back-end-of-line CMOS-compatible diode fabrication with pure boron ..."
Tihomir Knezevic et al. (2019)
- Tihomir Knezevic
, Tomislav Suligoj, Xingyu Liu, Lis K. Nanver, Ahmed Elsayed, Jan F. Dick, Jörg Schulze:
Back-end-of-line CMOS-compatible diode fabrication with pure boron deposition down to 50 °C. ESSDERC 2019: 242-245
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