BibTeX record conf/drc/NipaneSJCBYHT19

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@inproceedings{DBLP:conf/drc/NipaneSJCBYHT19,
  author       = {Ankur Nipane and
                  Punnu Jose Sebastian and
                  Younghun Jung and
                  Min Sup Choi and
                  Abhinandan Borah and
                  Won Jong Yoo and
                  James C. Hone and
                  James T. Teherani},
  title        = {Atomic Layer Etching {(ALE)} of WSe2 Yielding High Mobility p-FETs},
  booktitle    = {Device Research Conference, {DRC} 2019, Ann Arbor, MI, USA, June 23-26,
                  2019},
  pages        = {231--232},
  publisher    = {{IEEE}},
  year         = {2019},
  url          = {https://doi.org/10.1109/DRC46940.2019.9046402},
  doi          = {10.1109/DRC46940.2019.9046402},
  timestamp    = {Thu, 16 Jun 2022 14:52:28 +0200},
  biburl       = {https://dblp.org/rec/conf/drc/NipaneSJCBYHT19.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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