BibTeX record conf/dft/VogelsDDLH98

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@inproceedings{DBLP:conf/dft/VogelsDDLH98,
  author       = {Leon J. P. Vogels and
                  M. W. C. Dohmen and
                  P. Van Duijvenboden and
                  Robert A. Latimer and
                  J. D. O. Heffernan},
  title        = {A Yield Improvement Program Using Process Control and Process Optimization
                  for Particle Reduction Using In Situ Particle Monitoring on a Semitool
                  Magnum},
  booktitle    = {13th International Symposium on Defect and Fault-Tolerance in {VLSI}
                  Systems {(DFT} '98), 2-4 November 1998, Austin, TX, USA, Proceedings},
  pages        = {11--16},
  publisher    = {{IEEE} Computer Society},
  year         = {1998},
  url          = {https://doi.org/10.1109/DFTVS.1998.732146},
  doi          = {10.1109/DFTVS.1998.732146},
  timestamp    = {Fri, 24 Mar 2023 00:02:10 +0100},
  biburl       = {https://dblp.org/rec/conf/dft/VogelsDDLH98.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}