"A Yield Improvement Program Using Process Control and Process Optimization ..."

Leon J. P. Vogels et al. (1998)

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DOI: 10.1109/DFTVS.1998.732146

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Leon J. P. Vogels, M. W. C. Dohmen, P. Van Duijvenboden, Robert A. Latimer, J. D. O. Heffernan:
A Yield Improvement Program Using Process Control and Process Optimization for Particle Reduction Using In Situ Particle Monitoring on a Semitool Magnum. DFT 1998: 11-16

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