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@article{DBLP:journals/ibmrd/BrusicFHPS93, author = {Vlasta Brusic and Gerald S. Frankel and Chao{-}Kyn Hu and Miro M. Plechaty and Geraldine Cogin Schwartz}, title = {Corrosion and protection of thin-line conductors in {VLSI} structures}, journal = {{IBM} J. Res. Dev.}, volume = {37}, number = {2}, pages = {173--190}, year = {1993}, url = {https://doi.org/10.1147/rd.372.0173}, doi = {10.1147/RD.372.0173}, timestamp = {Fri, 13 Mar 2020 00:00:00 +0100}, biburl = {https://dblp.org/rec/journals/ibmrd/BrusicFHPS93.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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