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@inproceedings{DBLP:conf/dese/MackowiakALEBNZ19, author = {Piotr Mackowiak and Samer Al{-}Magazachi and Klaus{-}Dieter Lang and Kolja Erbacher and Manuel B{\"{a}}uscher and Ha{-}Duong Ngo and Kai Zoschke and Michael Schiffer}, title = {Ultra Thin Force and Acceleration Sensor Embedded in Flexible Thin Film Substrates Using Thin Chip Handling, Bonding and Carrier Release Technologies}, booktitle = {12th International Conference on Developments in eSystems Engineering, DeSE 2019, Kazan, Russia, October 7-10, 2019}, pages = {902--905}, publisher = {{IEEE}}, year = {2019}, url = {https://doi.org/10.1109/DeSE.2019.00167}, doi = {10.1109/DESE.2019.00167}, timestamp = {Thu, 14 Oct 2021 01:00:00 +0200}, biburl = {https://dblp.org/rec/conf/dese/MackowiakALEBNZ19.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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