"Microplasma-driven, atomic layer deposition of flexible electronic and ..."

Jinhong Kim (2021)

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type: Book or Thesis

metadata version: 2023-09-07

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Jinhong Kim:
Microplasma-driven, atomic layer deposition of flexible electronic and photonic nanofilms. University of Illinois Urbana-Champaign, USA, 2021

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