"Particles in Plasma Processing Reactors: Modeling Nucleation, Transport, ..."

Helen H. Hwang (1997)

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type: Book or Thesis

metadata version: 2023-09-07

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Helen H. Hwang:
Particles in Plasma Processing Reactors: Modeling Nucleation, Transport, and Interparticle Effects to Reduce Wafer Contamination. University of Illinois Urbana-Champaign, USA, 1997

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