"Measurement of the Electron Density and the Attachment Rate Coefficient in ..."

Charles B. Fleddermann (1985)

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type: Book or Thesis

metadata version: 2023-08-31

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Charles B. Fleddermann:
Measurement of the Electron Density and the Attachment Rate Coefficient in Silane/helium Discharges. University of Illinois Urbana-Champaign, USA, 1985

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