BibTeX record phd/ndltd/Osterberg95

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@phdthesis{DBLP:phd/ndltd/Osterberg95,
  author    = {Peter M. Osterberg},
  title     = {Electrostatically actuated microelectromechanical test structures
               for material property measurement},
  school    = {Massachusetts Institute of Technology, Cambridge, MA, {USA}},
  year      = {1995},
  url       = {http://hdl.handle.net/1721.1/11097},
  timestamp = {Mon, 08 May 2017 16:29:45 +0200},
  biburl    = {https://dblp.org/rec/phd/ndltd/Osterberg95.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
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