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"Optimal One-Wafer Cyclic Scheduling of Time-Constrained Hybrid ..."
FaJun Yang et al. (2017)
- FaJun Yang, Naiqi Wu, Yan Qiao, MengChu Zhou:
Optimal One-Wafer Cyclic Scheduling of Time-Constrained Hybrid Multicluster Tools via Petri Nets. IEEE Trans. Syst. Man Cybern. Syst. 47(11): 2920-2932 (2017)
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