"Optimal One-Wafer Cyclic Scheduling of Single-Arm Multicluster Tools With ..."

FaJun Yang et al. (2014)

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DOI: 10.1109/TSMC.2014.2327051

access: closed

type: Journal Article

metadata version: 2020-05-20

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FaJun Yang, Naiqi Wu, Yan Qiao, MengChu Zhou:
Optimal One-Wafer Cyclic Scheduling of Single-Arm Multicluster Tools With Two-Space Buffering Modules. IEEE Trans. Syst. Man Cybern. Syst. 44(12): 1584-1597 (2014)

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