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"An Efficient Scheduling Method for Single-Arm Cluster Tools With ..."

WenQing Xiong et al. (2023)

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DOI: 10.1109/TSMC.2022.3222915

access: closed

type: Journal Article

metadata version: 2023-06-15

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WenQing Xiong, Jie Li, Yan Qiao, Liping Bai, Baoying Huang, NaiQi Wu:
An Efficient Scheduling Method for Single-Arm Cluster Tools With Multifunctional Process Modules. IEEE Trans. Syst. Man Cybern. Syst. 53(6): 3270-3283 (2023)

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