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"Petri Net Modeling and Cycle-Time Analysis of Dual-Arm Cluster Tools With ..."

Naiqi Wu et al. (2013)

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DOI: 10.1109/TSMCA.2012.2187890

access: closed

type: Journal Article

metadata version: 2023-01-30

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Naiqi Wu, Feng Chu, Chengbin Chu, MengChu Zhou:
Petri Net Modeling and Cycle-Time Analysis of Dual-Arm Cluster Tools With Wafer Revisiting. IEEE Trans. Syst. Man Cybern. Syst. 43(1): 196-207 (2013)

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