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"Indirect adaptive control of reactive ion etching using neural networks."

David Stokes, Gary S. May (2001)

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DOI: 10.1109/70.964665

access: closed

type: Journal Article

metadata version: 2020-05-19

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David Stokes, Gary S. May:
Indirect adaptive control of reactive ion etching using neural networks. IEEE Trans. Robotics Autom. 17(5): 650-657 (2001)

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