"Simultaneous Surface Profiling of Transparent Optical Flats on Wavelength ..."

Yonghao Zhou et al. (2025)

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DOI: 10.1109/TIM.2025.3547094

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type: Journal Article

metadata version: 2025-05-09

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Yonghao Zhou, Bin Shen, Xingyu Lin, Lin Chang, Jiaoyang Li, Yingjie Yu:
Simultaneous Surface Profiling of Transparent Optical Flats on Wavelength Tuning Interferometry Using Dual-Window All-Phase Harmonic Demodulation. IEEE Trans. Instrum. Meas. 74: 1-12 (2025)

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