"Liquid Hydrogen Temperature Cryostage for Ice-Assisted Electron-Beam ..."

Rui Zheng et al. (2024)

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DOI: 10.1109/TIM.2024.3485441

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type: Journal Article

metadata version: 2024-11-30

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Rui Zheng, Limin Qi, Sizhuo Li, Zhihua Gan, Ding Zhao, Min Qiu:
Liquid Hydrogen Temperature Cryostage for Ice-Assisted Electron-Beam Lithography. IEEE Trans. Instrum. Meas. 73: 1-4 (2024)

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