"A Self Calibration Oxide Film Thickness Measurement Method Based on ..."

Qi Xiao et al. (2025)

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DOI: 10.1109/TIM.2025.3552812

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type: Journal Article

metadata version: 2025-05-09

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Qi Xiao, Ming Li, Songling Huang, Xiaoguang Li, Lisha Peng, Chaofeng Ye:
A Self Calibration Oxide Film Thickness Measurement Method Based on Stacked Array Coils. IEEE Trans. Instrum. Meas. 74: 1-9 (2025)

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