"Analysis and Experiment of Self-Differential Eddy Current Displacement ..."

Kun Wang et al. (2018)

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DOI: 10.1109/TIM.2018.2806998

access: closed

type: Journal Article

metadata version: 2020-06-08

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Kun Wang, Lisheng Zhang, Bangcheng Han, Shaohua Chen:
Analysis and Experiment of Self-Differential Eddy Current Displacement Sensor for AMBs Used in Molecular Pump. IEEE Trans. Instrum. Meas. 67(8): 1815-1824 (2018)

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