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"Low-Drift MEMS Thermal Wind Sensor With Symmetric Packaging Using Plastic ..."

Zhenjun Wang et al. (2021)

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DOI: 10.1109/TIM.2021.3066175

access: closed

type: Journal Article

metadata version: 2021-04-07

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Zhenjun Wang, Zhenxiang Yi, Ming Qin, Qing-An Huang:
Low-Drift MEMS Thermal Wind Sensor With Symmetric Packaging Using Plastic Injection Molding Process. IEEE Trans. Instrum. Meas. 70: 1-8 (2021)

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