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"A Hand-Held Smart Wet Etch Monitor: Design, Theory, and Test."

Mandira S. Thakurdesai, Michael A. Parker (2006)

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DOI: 10.1109/TIM.2006.880268

access: closed

type: Journal Article

metadata version: 2020-06-08

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Mandira S. Thakurdesai, Michael A. Parker:
A Hand-Held Smart Wet Etch Monitor: Design, Theory, and Test. IEEE Trans. Instrum. Meas. 55(5): 1814-1822 (2006)

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