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"Planar Motion Measurement of a Compliant Micro Stage: An Enhanced ..."

Gaozhao Su, Guoliang Lu, Peng Yan (2020)

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DOI: 10.1109/TIM.2019.2924066

access: closed

type: Journal Article

metadata version: 2020-06-08

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Gaozhao Su, Guoliang Lu, Peng Yan:
Planar Motion Measurement of a Compliant Micro Stage: An Enhanced Microscopic Vision Approach. IEEE Trans. Instrum. Meas. 69(5): 1930-1939 (2020)

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