"Microelectromechanical systems in electrical metrology."

Heikki Seppä, Jukka Kyynäräinen, Aarne S. Oja (2001)

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DOI: 10.1109/19.918161

access: closed

type: Journal Article

metadata version: 2020-06-08

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Heikki Seppä, Jukka Kyynäräinen, Aarne S. Oja:
Microelectromechanical systems in electrical metrology. IEEE Trans. Instrum. Meas. 50(2): 440-444 (2001)

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