"Opportunities and Challenges in Using Modulated Electrostatic Softening in ..."

Christian Padovani et al. (2025)

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DOI: 10.1109/TIM.2025.3565346

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type: Journal Article

metadata version: 2025-05-31

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Christian Padovani, Luca Pileri, Leonardo Gaffuri Pagani, Philippe Robert, Giacomo Langfelder:
Opportunities and Challenges in Using Modulated Electrostatic Softening in FM MEMS Accelerometers. IEEE Trans. Instrum. Meas. 74: 1-9 (2025)

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