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"Error Calibration Method Based on Perspective Mapping for Wafer Automatic ..."
Chao Meng et al. (2022)
- Chao Meng, Jinfei Shi, Fei Hao, Panyu Li:
Error Calibration Method Based on Perspective Mapping for Wafer Automatic Optical Inspection System. IEEE Trans. Instrum. Meas. 71: 1-15 (2022)
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