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"Astigmatic Detection System With Feedback Mechanism for Calibrating ..."
Hsien-Shun Liao et al. (2023)
- Hsien-Shun Liao
, Zheng-Rong Guo
, Hong-Sheng Tan
, Kuangyuh Huang
, Ing-Shouh Hwang
, En-Te Hwu
:
Astigmatic Detection System With Feedback Mechanism for Calibrating Driving Waveform of Piezoelectric Actuators. IEEE Trans. Instrum. Meas. 72: 1-7 (2023)

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