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"A Holistic Self-Calibration Algorithm for xy Precision Metrology Systems."
Chuxiong Hu et al. (2012)
- Chuxiong Hu, Yu Zhu, Jinchun Hu, Ming Zhang, Dengfeng Xu:
A Holistic Self-Calibration Algorithm for xy Precision Metrology Systems. IEEE Trans. Instrum. Meas. 61(9): 2492-2500 (2012)
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