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"Optical properties of fluorinated silicon oxide films by liquid phase ..."

Tetsuya Homma et al. (1998)

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DOI: 10.1109/19.744328

access: closed

type: Journal Article

metadata version: 2020-06-08

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  - https://dblp.org/rec/journals/tim/HommaSOIYT98
Tetsuya Homma, Atsushi Satoh, Seiji Okada, Masahiro Itoh, Masaki Yamaguchi, Hideo Takahashi:
Optical properties of fluorinated silicon oxide films by liquid phase deposition for optical waveguides. IEEE Trans. Instrum. Meas. 47(3): 698-702 (1998)

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