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"Measurement of Thermal Diffusivity of Thin Film in Thickness Direction ..."

Shijie Chen et al. (2022)

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DOI: 10.1109/TIM.2022.3155760

access: closed

type: Journal Article

metadata version: 2023-05-17

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Shijie Chen, Feihu Zheng, Chenyu Huang, Yewen Zhang:
Measurement of Thermal Diffusivity of Thin Film in Thickness Direction Using an Ordinary Dielectric Film as the Sensor. IEEE Trans. Instrum. Meas. 71: 1-9 (2022)

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