"Omnidirectional 3-D AFM Integrated With a Rotary Stage for High-Precision ..."

Huang-Chih Chen et al. (2024)

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DOI: 10.1109/TIM.2024.3461789

access: closed

type: Journal Article

metadata version: 2024-10-22

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Huang-Chih Chen, Sheng-An Lee, Kuan-Wei Huang, Sheng-Wei Peng, Li-Chen Fu:
Omnidirectional 3-D AFM Integrated With a Rotary Stage for High-Precision Sidewall Structure. IEEE Trans. Instrum. Meas. 73: 1-13 (2024)

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