"Composite Phase-Shifting and Height Fusion Algorithm With Vibration-Robust ..."

Ruikun Chen et al. (2025)

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DOI: 10.1109/TIM.2025.3551853

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type: Journal Article

metadata version: 2025-05-09

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Ruikun Chen, Jian Gao, Zhuojun Zheng, Lanyu Zhang, Junwen Tan:
Composite Phase-Shifting and Height Fusion Algorithm With Vibration-Robust in White Light Interferometry. IEEE Trans. Instrum. Meas. 74: 1-9 (2025)

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