"Real-Time Iterative Compensation Control Using Plant-Injection Feedforward ..."

Ran Zhou et al. (2024)

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DOI: 10.1109/TII.2024.3413294

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type: Journal Article

metadata version: 2025-04-17

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Ran Zhou, Chuxiong Hu, Ze Wang, Yu Zhu, Masayoshi Tomizuka:
Real-Time Iterative Compensation Control Using Plant-Injection Feedforward Architecture With Application to Ultraprecision Wafer Stages. IEEE Trans. Ind. Informatics 20(10): 11708-11719 (2024)

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