"Data-Driven Adaptive Virtual Metrology for Yield Prediction in Multibatch ..."

Hongwei Xu et al. (2022)

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DOI: 10.1109/TII.2022.3162268

access: closed

type: Journal Article

metadata version: 2022-10-18

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Hongwei Xu, Wei Qin, Youlong Lv, Jie Zhang:
Data-Driven Adaptive Virtual Metrology for Yield Prediction in Multibatch Wafers. IEEE Trans. Ind. Informatics 18(12): 9008-9016 (2022)

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