"Multi-Zone Thermal Processing in Semiconductor Manufacturing: Bias Estimation."

Keck Voon Ling et al. (2010)

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DOI: 10.1109/TII.2010.2040285

access: closed

type: Journal Article

metadata version: 2020-06-15

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Keck Voon Ling, Han Yan, Weng Khuen Ho, Khiang Wee Lim:
Multi-Zone Thermal Processing in Semiconductor Manufacturing: Bias Estimation. IEEE Trans. Ind. Informatics 6(2): 216-228 (2010)

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