"Kalman-Filtering-Based Iterative Feedforward Tuning in Presence of ..."

Li Li et al. (2019)

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DOI: 10.1109/TII.2019.2906331

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type: Journal Article

metadata version: 2025-01-19

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Li Li, Yang Liu, Liyi Li, Jiubin Tan:
Kalman-Filtering-Based Iterative Feedforward Tuning in Presence of Stochastic Noise: With Application to a Wafer Stage. IEEE Trans. Ind. Informatics 15(11): 5816-5826 (2019)

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