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"Design of a Long Stroke Nanopositioning Stage With Self-Damping Actuator ..."

Chi Zhang et al. (2022)

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DOI: 10.1109/TIE.2021.3126981

access: closed

type: Journal Article

metadata version: 2022-05-18

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Chi Zhang, Xiaolu Huang, Miao Yang, Silu Chen, Guilin Yang:
Design of a Long Stroke Nanopositioning Stage With Self-Damping Actuator and Flexure Guide. IEEE Trans. Ind. Electron. 69(10): 10417-10427 (2022)

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