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"High-Speed Near-Surface Tracking for Fast Atomic Force Microscope Scan ..."

Shenghang Zhai et al. (2024)

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DOI: 10.1109/TIE.2023.3250848

access: closed

type: Journal Article

metadata version: 2023-08-31

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Shenghang Zhai, Jialin Shi, Peng Yu, Huiyao Shi, Kaixuan Wang, Chanmin Su, Lianqing Liu:
High-Speed Near-Surface Tracking for Fast Atomic Force Microscope Scan Switching Based on the Squeeze Film Damping Effect. IEEE Trans. Ind. Electron. 71(2): 2060-2069 (2024)

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