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"Equipment Design and Control of Advanced Thermal-Processing Module in ..."

Arthur Tay et al. (2010)

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DOI: 10.1109/TIE.2009.2026230

access: closed

type: Journal Article

metadata version: 2020-10-26

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Arthur Tay, Hui Tong Chua, Yuheng Wang, Yit Sung Ngo:
Equipment Design and Control of Advanced Thermal-Processing Module in Lithography. IEEE Trans. Ind. Electron. 57(3): 1112-1119 (2010)

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