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"Development of MEMS Acoustic Sensor With Microtunnel for High SPL Measurement."
Mahanth Prasad, Aditi, Vinod Kumar Khanna (2022)
- Mahanth Prasad, Aditi, Vinod Kumar Khanna:
Development of MEMS Acoustic Sensor With Microtunnel for High SPL Measurement. IEEE Trans. Ind. Electron. 69(3): 3142-3150 (2022)
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