"Development of a Stepping Piezoelectric Actuator for an Autofocus ..."

Jianxing Li et al. (2024)

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DOI: 10.1109/TIE.2023.3299039

access: closed

type: Journal Article

metadata version: 2024-02-29

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Jianxing Li, Shijing Zhang, Jie Deng, Yingxiang Liu:
Development of a Stepping Piezoelectric Actuator for an Autofocus Microscopic Observation System. IEEE Trans. Ind. Electron. 71(6): 6107-6116 (2024)

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